systems by amassing unparalleled engineering capability and innovation across substrate transport and controlled environments that differentiate our best-in-class solutions. our advanced vacuum wafer transport technology is ideally suited for tool automation applications in semiconductor wafer processing...
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semiconductor tool automation semiconductor applications demand high-precision automation and reliable, predictable vacuum performance for wafer transport within clean and controlled environments. brooks offers a full suite of automated handling solutions — available as standalone components or as part...
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