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crystalline silicon bulk. schematic structure of a cmos chip, as built in the early s. the graphic shows ldd-misfet's on an soi substrate with five metallization layers and solder bump for flip-chip bonding. it also shows the section for feol (front-end of line), beol (back-end of line) and first parts...
crystalline silicon bulk. schematic structure of a cmos chip, as built in the early s. the graphic shows ldd-misfet's on an soi substrate with five metallization layers and solder bump for flip-chip bonding. it also shows the section for feol (front-end of line), beol (back-end of line) and first parts...
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