low pressure and large target -to-wafer distance to create a directional flux of deposited species. alternating aperture phase shift mask (aapsm or alt-apsm) a type of psm that has regions of the quartz substrate etched to different depths so as to introduce a degree phase shift in the transmitted light...
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diode (led). subsequent zone alarms cause the audible signal to sound again until silenced by switch operation. restoring alarm, supervisory and trouble conditions to normal; extinguishes the associated led and causes the audible signal to sound again until restoring restoration is acknowledged by switch...
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