Instruments for checking semiconductor wafers

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domäne - hier sind frt messgeräte zu hause. wir bieten optische oberflächenmesstechnik für verschiedene anwendungen von micro electro mechanical systems. waferdicke / ttv semi-konforme dicken- und ttv-messung vollständige waferdickenkarte in d-ansicht, polierter si-wafer profile eines polierten si-wafers

through-silicon-vias (tsv) profilmessung eines einzelnen tsv (tiefe, obere & untere cd) hybride metrologie kombination verschiedener sensoren, automatisierte berechnung der gewünschten probenparameter beispiel für hybride metrologie trenches trenches mit hohem aspektverhältnis flächenmessung eines wafers...

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